Equilibrium calculations for VPE-InGaAsP
نویسندگان
چکیده
2014 The heterogeneous equilibrium in the InGaAsP/HCl/H2 system has been studied at pressure and temperature conditions pertaining to the hydride-VPE growth. The results have been compared with the available experimental data on the growth of the above quaternary alloys lattice-matched to InP. A remarkably good agreement has been achieved with some existing data. Possible causes of discrepancies both between equilibrium and experimental results and between different experimental findings have been briefly discussed. Tome 16 N° 1 Janvier 1981
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